Publication:
Synchrotron measurement of the effect of dielectric porosity and air gaps on the stress in advanced Cu/low-k interconnects
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1891 since deposited on 2021-10-18
1last month
Acq. date: 2026-10-03
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Statistics
Views
1891 since deposited on 2021-10-18
1last month
Acq. date: 2026-10-03
Citations