Browsing by Author "O'Neill, Anthony"
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Publication A NEMS based sensor to monitor stress in deep sub-micron Cu/Low-$k$ interconnects
Journal article2009, Semicond. Sci. Technol., (24) 11, p.115018Publication Analysis and characterization of a mechanical sensor to monitor stress in interconnect features
Journal article2010, Thin Solid Films, (519) 1, p.443-449Publication Reduced self-heating by strained silicon substrate engineering