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Browsing by Author "O Neill, A.G."

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    Study of the effect of dielectric porosity on the stress in advanced Cu/low-k interconnects using x-ray diffraction

    Wilson, Chris  
    ;
    Zhao, Chao
    ;
    Zhao, Larry
    ;
    Metzger, T.H.
    ;
    Tokei, Zsolt  
    ;
    Croes, Kristof  
    Journal article
    2009, Applied Physics Letters, (94) 18, p.181914

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