Browsing by Author "Oechsner, Richard"

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Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites

Oechsner, Richard
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Pfeffer, M.
;
Frickinger, J.
;
Schellenberger, M.
;
Roeder, G.
;
Pfitzner, L.
Journal article
2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221
E-learning for microelectronics manufacturing

Oechsner, Richard
;
Pfeffer, Marcus
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Pfitzner, Lothar
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Ryssel, Heiner
;
Beer, Kai
Proceedings paper
2004, International Symposium on Semiconductor Manufacturing, 27/09/2004
Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation

Pfeffer, Markus
;
Oechsner, Richard
;
Pfitzner, Lothar
;
Ryssel, Heiner
;
Ocker, Berthold
Proceedings paper
2008, ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - IDETC/CIE, 3/08/2008