Browsing by Author "Ogle, B."
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Publication Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
; ; ; ; Publication Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.119-122Publication Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Soft breakdown in very thin Ta2 O5 gate dielectric layers
Journal article2000, Solid-State Electronics, (44) 3, p.521-525