Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Ogura, M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    High performance n-mos FinFET by damage-free, conformal extension doping

    Zschaetzsch, Gerd
    ;
    Sasaki, Y.
    ;
    Hayashi, S.
    ;
    Togo, Mitsuhiro
    ;
    Chiarella, Thomas  
    Proceedings paper
    2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.841-844

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings