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Browsing by Author "Ogura, M."

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    High performance n-mos FinFET by damage-free, conformal extension doping

    Zschaetzsch, Gerd
    ;
    Sasaki, Y.
    ;
    Hayashi, S.
    ;
    Togo, Mitsuhiro
    ;
    Chiarella, Thomas  
    Proceedings paper
    2011, IEEE International Electron Devices Meeting - IEDM, 5/12/2011, p.841-844

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