Browsing by Author "Ohlsson, O."

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Evaluating probes for "electrical" atomic force microscopy

Trenkler, Thomas
;
Hantschel, Thomas
;
Stephenson, Robert
;
De Wolf, Peter
;
Hellemans, L.
Proceedings paper
1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436
Evaluating probes for "electrical" atomic force microscopy

Trenkler, Thomas
;
Hantschel, Thomas
;
Stephenson, Robert
;
De Wolf, Peter
;
Vandervorst, Wilfried
Journal article
2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427