Browsing by Author "Okamoto, Y."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Better prediction on patterning failure mode with hotspot aware OPC modeling
Proceedings paper2021, Metrology, Inspection, and Process Control for Microlithography XXXIV, 22/02/2021, p.1161112Publication Realizing more accurate OPC models by utilizing SEM contours