Publication:

Better prediction on patterning failure mode with hotspot aware OPC modeling

Date

2021
Proceedings Paper
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Author(s)

Wei, Chih-I
;
Wu, Stewart  
;
Deng, Yunfei
;
Khaira, Gurdaman
;
Kusnadi, I.
;
Fenger, G.
;
Kang, S.
;
Okamoto, Y.
;
Maruyama, K.
;
Yamaszaki, Y.
;
Das, Sayantan  
;
Halder, Sandip  
;
Gillijns, Werner  
;
Lorusso, Gian  

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2150 since deposited on 2021-10-31
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2150 since deposited on 2021-10-31
Acq. date: 2026-01-25

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