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Better prediction on patterning failure mode with hotspot aware OPC modeling
Publication:
Better prediction on patterning failure mode with hotspot aware OPC modeling
Date
2021
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wei, Chih-I
;
Wu, Stewart
;
Deng, Yunfei
;
Khaira, Gurdaman
;
Kusnadi, I.
;
Fenger, G.
;
Kang, S.
;
Okamoto, Y.
;
Maruyama, K.
;
Yamaszaki, Y.
;
Das, Sayantan
;
Halder, Sandip
;
Gillijns, Werner
;
Lorusso, Gian
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2146
since deposited on 2021-10-31
Acq. date: 2025-10-24
Citations
Metrics
Views
2146
since deposited on 2021-10-31
Acq. date: 2025-10-24
Citations