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Browsing by Author "Okamoto, Yosuke"

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    Publication

    Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling

    Wei, Chih-, I
    ;
    Kang, Seulki
    ;
    Das, Sayantan  
    ;
    Oya, Masahiro
    ;
    Okamoto, Yosuke
    ;
    Maruyama, Kotaro
    Journal article
    2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041603

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