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Browsing by Author "Okuno, Y"

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    Stress analysis of Si1-xGex embedded source/drain junctions

    Bargallo Gonzalez, Mireia
    ;
    Simoen, Eddy  
    ;
    Naka, N.
    ;
    Okuno, Y
    ;
    Eneman, Geert  
    ;
    Hikavyy, Andriy  
    Journal article
    2008, Materials Sicience in Semiconductor Processing, (11) 5, p.285-290

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