Stress analysis of Si1-xGex embedded source/drain junctions

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Author(s)

Bargallo Gonzalez, Mireia

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Hikavyy, Andriy

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Verheyen, Peter

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Machkaoutsan, Vladimir

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Tomasini, Pierre

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Journal

Materials Sicience in Semiconductor Processing

Metrics

1957 since deposited on 2021-10-17

Acq. date: 2025-10-23