Publication:

Stress analysis of Si1-xGex embedded source/drain junctions

Date

2008
Journal article
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dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorNaka, N.
dc.contributor.authorOkuno, Y
dc.contributor.authorEneman, Geert
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorTomasini, Pierre
dc.contributor.authorThomas, S.G.
dc.contributor.authorLu, J.P
dc.contributor.authorWise, Rick
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T06:15:15Z
dc.date.available2021-10-17T06:15:15Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13342
dc.source.beginpage285
dc.source.endpage290
dc.source.issue5
dc.source.journalMaterials Sicience in Semiconductor Processing
dc.source.volume11
dc.title

Stress analysis of Si1-xGex embedded source/drain junctions

dc.typeJournal article
dspace.entity.typePublication
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