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Browsing by Author "Okuno, Y."

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    Ultra low-EOT (5 Å) gate-first and gate-last high performance CMOS achieved by gate-electrode optimization

    Ragnarsson, Lars-Ake  
    ;
    Li, Zilan
    ;
    Tseng, Joshua
    ;
    Schram, Tom  
    ;
    Rohr, Erika
    ;
    Cho, Moon Ju
    Proceedings paper
    2009, IEEE International Electron Devices Meeting - IEDM, 7/12/2009, p.663-666

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