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Browsing by Author "Olk, Christina"

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    Publication

    Leakage control in 0.4-nm EOT Ru/SrTiOx/Ru metal-insulator-metal capacitors: process implications

    Swerts, Johan  
    ;
    Popovici, Mihaela Ioana  
    ;
    Kaczer, Ben  
    ;
    Aoulaiche, Marc
    ;
    Redolfi, Augusto  
    Journal article
    2014, IEEE Electron Device Letters, (37) 7, p.753-755

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