Browsing by Author "Ollier, Eric"
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Publication Mass-detection based in-plane resonant nano-electro-mechanical sensors
Oral presentation2013, Japan Society of Applied Physics (JSAP) Annual MeetingPublication Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Meeting abstract2012, MRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI, 9/04/2012Publication Silicon nanowires for advanced sensing: Electrical and electromechanical characteristics and functionalisation technology
Proceedings paper2011, International Symposium on Advanced Hybrid Nano Devices - IS AHND, 4/10/2011Publication Suspended silicon nanowire devices for chemical and biological sensing
Oral presentation2012, GdR Nanofils Nanotubes SemiconducteursPublication Towards nano-scale resonant gas sensors