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Browsing by Author "Olsson, J."

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    Metal gate work function extraction using Fowler-Nordheim tunneling techniques

    Sjöblom, G.
    ;
    Pantisano, Luigi
    ;
    Schram, Tom  
    ;
    Olsson, J.
    ;
    Afanas'ev, V.
    ;
    Heyns, Marc  
    Journal article
    2005, Microelectronic Engineering, 80, p.280-283
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    On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices

    Westlinder, J.
    ;
    Schram, Tom  
    ;
    Pantisano, Luigi
    ;
    Cartier, Eduard
    ;
    Kerber, Andreas
    Journal article
    2003, IEEE Electron Device Letters, (24) 9, p.550-552

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