Publication:
On the thermal stability of atomic layer deposited TiN as gate electrode in MOS devices
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1872 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1872 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations