Browsing by Author "Ono, Y."

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Integration of an organic ultra low-k (k=2.2) material

Pantouvaki, Marianna
;
Zhao, Larry
;
Huffman, Craig
;
Heylen, Nancy
;
Ferchichi, Abdelkarim
;
Ono, Y.
Oral presentation
2009, Advanced Metallization Conference - AMC
Integration of an organic ultra low-k (k=2.2) material

Pantouvaki, Marianna
;
Zhao, Larry
;
Huffman, Craig
;
Heylen, Nancy
;
Ferchichi, Abdelkarim
;
Ono, Y.
Proceedings paper
2010, Advanced Metallization Conference 2009 - AMC 2009, 13/10/2009, p.173-184