Browsing by Author "Ono, Yukiharu"
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Publication Advanced organic polymers for the aggressive scaling of low-k materials
Proceedings paper2010, International Conference on Solid State Devices and Materials - SSDM, 22/09/2010, p.844-845Publication Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers
Journal article2011, Journal of Applied Physics, (109) 7, p.74301Publication Ultra low-k materials based on self-assembled organic polymers
Proceedings paper2011, Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 26/04/2011, p.1335-o01-02