Browsing by Author "Opsal, Jon"
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Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Journal article2008, Journal of Vacuum Science and Technology B, (26) 1, p.310-316Publication Advances in optical carrier profiling through high-frequency modulated optical reflectance
Proceedings paper2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, 6/05/2007, p.71-81