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Advances in optical carrier profiling through high-frequency modulated optical reflectance
Publication:
Advances in optical carrier profiling through high-frequency modulated optical reflectance
Date
2008
Journal article
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15408.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Dortu, Fabian
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Shaughnessy, Derrick
;
Salnick, Alex
;
Nicolaides, Lena
;
Opsal, Jon
Journal
Journal of Vacuum Science and Technology B
Abstract
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1911
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1911
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations