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Browsing by Author "Orain, I."

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    15nm HP patterning with EUV and SADP: key contributors for improvement of LWR, LER, and CDU

    Xu, Kaidong
    ;
    Souriau, Laurent  
    ;
    Hellin, David  
    ;
    Versluijs, Janko  
    ;
    Wong, Patrick  
    Proceedings paper
    2013, Advanced Etch Technology for Nanopatterning II, 23/02/2013, p.86850C

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