Browsing by Author "Osterberg, Frederik"
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Publication Accurate micro Hall effect measurement on scribe line pads
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009Publication Atomic layer deposition of ruthenium with TiN interface for sub-10nm advanced interconnects beyond copper
Journal article2016-09, ACS Applied Materials & Interfaces, (9) 39, p.26119-26125Publication Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology
Proceedings paper2009, 17th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2009