Browsing by Author "Otto, O."
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Publication Feature biasing versus feature-assisted lithography. A comparison of proximity correction methods for 0.5*(l/NA) lithography
Proceedings paper1995, Optical Laser Microlithography VIII, 22/02/1995, p.150-170Publication Optical proximity correction for 0.3 μm i-line lithography
Journal article1996, Microelectronic Engineering, 30, p.141-144