Publication:
Feature biasing versus feature-assisted lithography. A comparison of proximity correction methods for 0.5*(l/NA) lithography
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1981 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1981 since deposited on 2021-09-29
2last month
Acq. date: 2025-12-12
Citations