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Browsing by Author "Paladugu, E."

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    A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow

    Clark, William
    ;
    Juncker, Aurelie
    ;
    Paladugu, E.
    ;
    Fried, David
    ;
    Wilson, Chris  
    ;
    Pourtois, Geoffrey  
    Proceedings paper
    2016, International Conference on Simulation of Semiconductor Processes and Devices - SISPAD, 6/09/2016, p.43-46

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