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A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow
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1 since deposited on 2021-10-23
Acq. date: 2025-10-23
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1950 since deposited on 2021-10-23
Acq. date: 2025-10-23
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1 since deposited on 2021-10-23
Acq. date: 2025-10-23
Views
1950 since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations