Publication:
A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2026-07-27
Views
1967 since deposited on 2021-10-23
3last month
1last week
Acq. date: 2026-07-27
Citations
Statistics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2026-07-27
Views
1967 since deposited on 2021-10-23
3last month
1last week
Acq. date: 2026-07-27
Citations