Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Palmer, S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Feature biasing versus feature-assisted lithography. A comparison of proximity correction methods for 0.5*(l/NA) lithography

    Pforr, Rainer
    ;
    Wong, Alfred
    ;
    Ronse, Kurt  
    ;
    Van den hove, Luc  
    ;
    Yen, Anthony
    ;
    Palmer, S.
    ;
    Fuller, G.
    Proceedings paper
    1995, Optical Laser Microlithography VIII, 22/02/1995, p.150-170

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings