imec Institutional Repository Browsing {{ collection }} by Author "Palov, A."

Publication

Calculation of dielectric constant of porous SiCOH low-k films

Palov, A.

;

Rakhimova, T

;

Krishtab, Mikhail

;

Baklanov, Mikhaïl

Journal article

2015, Journal of Vacuum Science and Technology B, (33) 2, p.20603

Publication

Interaction of atomic fluorine with porous low-k SiCOH films: modeling

Palov, A.

;

Voronina, E.

;

Lopaev, D.

;

Mankelevich, Y.

;

Rakhimova, T.

;

Zyryanov, S.

;

Proshina, O.

Oral presentation

2015, 22nd International Symposium on Plasma Chemistry - ISPC

Publication

Low-k OSG damage and etching by F atoms at lowered temperatures

Zyryanov, S.

;

Kurchikov, D.

;

Lopaev, D.

;

Mankelevich, Y.

;

Palov, A.

;

Rakhimova, T.

;

Voronina, E.

Oral presentation

2015, 22nd International Symposium on Plasma Chemistry - ISPC

Publication

Modelling degradation of PTFE under electron irradiation

Palov, A.

;

Fujii, H.

;

Mankelevich, Y.

;

Rakhimova, T.

;

Baklanov, Mikhaïl

Journal article

2012, Polymer Degradation and Stability, (97) 5, p.802-809

Publication

Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films

Mankelevich, Y.

;

Voronina, E.

;

Rakhimova, T.

;

Palov, A.

;

Lopaev, D.V.

;

Zyryanov, S.M.

Journal article

2016, Journal of Physics D: Applied Physics, (49) 34, p.345203

Browsing by Author "Palov, A."