Publication:
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films
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1939 since deposited on 2021-10-23
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Acq. date: 2026-01-27
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Statistics
Views
1939 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-01-27
Citations