Publication:
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films
Date
| dc.contributor.author | Mankelevich, Y. | |
| dc.contributor.author | Voronina, E. | |
| dc.contributor.author | Rakhimova, T. | |
| dc.contributor.author | Palov, A. | |
| dc.contributor.author | Lopaev, D.V. | |
| dc.contributor.author | Zyryanov, S.M. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-23T12:30:11Z | |
| dc.date.available | 2021-10-23T12:30:11Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0022-3727 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26956 | |
| dc.identifier.url | http://iopscience.iop.org/article/10.1088/0022-3727/49/34/345203/meta | |
| dc.source.beginpage | 345203 | |
| dc.source.issue | 34 | |
| dc.source.journal | Journal of Physics D: Applied Physics | |
| dc.source.volume | 49 | |
| dc.title | Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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