Browsing by Author "Palov, A.P."
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Publication Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
;Rakhimova, T. ;Lopaev, D. ;Mankelevich, Y. ;Kurchikov, K. ;Zyryanov, S.Palov, A.P.Journal article2015, Journal of Physics D: Applied Physics, (48) 17, p.175204