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Browsing by Author "Palov, A.P."

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    Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching

    Rakhimova, T.
    ;
    Lopaev, D.
    ;
    Mankelevich, Y.
    ;
    Kurchikov, K.
    ;
    Zyryanov, S.
    ;
    Palov, A.P.
    Journal article
    2015, Journal of Physics D: Applied Physics, (48) 17, p.175204

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