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    Multifractal analysis of line-edge roughness

    Costantoudis, Vassilios
    ;
    Papaverios, George
    ;
    Lorusso, Gian  
    ;
    Rutigliani, Vito  
    ;
    Van Roey, Frieda  
    Proceedings paper
    2018, Metrologia, Inspection, and Process Control for Microlithography XXXII, 2018-02-25, p.1058534

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