Browsing by Author "Papavieros, George"
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Publication Computational nanometrology of line edge roughness: recent challenges and advances
Proceedings paper2017, EMLC2017, 27/06/2017Publication Computational nanometrology of line edge roughness: recent challenges and advances
Oral presentation2017, 43rd International Conference on Micro and Nanoengineering - MNEPublication Computational nanometrology of line-edge roughness: noise effectd, cross-line correlations and the role of etch transfer
Proceedings paper2018, Advanced Etch Technology for Nanopatterning VII, 25/02/2018, p.105890YPublication Deep learning nanometrology of line edge roughness
Publication Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization
Proceedings paper2018, Metrology, Inspection, and Process Control for Microlithography XXXII, 25/02/2018, p.105851K