Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Papvieros, George"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Challenges in line edge roughness metrology in directed self-assembly lithography: placement errors and cross-line correlations

    Constantoudis, Vassilios
    ;
    Papvieros, George
    ;
    Gogolides, Evangelos
    ;
    Vaglio Pret, Alessandro  
    Journal article
    2017, Journal of Micro/Nanolithography MEMS and MOEMS, (16) 2, p.24001

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings