Browsing by Author "Pargon, Erwine"
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Publication 2D and 3D photoresist line roughness characterization
Oral presentation2012, 38th International Micro & Nano Engineering Conference - MNEPublication 2D and 3D photoresist line roughness characterization
Journal article2013, Microelectronic Engineering, 110, p.100-107Publication Smoothening of 193 immersion resist by 172 nm VUV exposure
Meeting abstract2010, AVS 57th International Symposium & Exhibition, 17/10/2010