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Browsing by Author "Park, Jin Hee"

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    Impact of barrier integrity on liner reliability in 3D through silicon vias

    Li, Yunlong  
    ;
    Civale, Yann
    ;
    Oba, Yoshiyuki
    ;
    Cockburn, Andrew  
    ;
    Park, Jin Hee
    ;
    Beyne, Eric  
    Proceedings paper
    2013, IEEE International Reliability Physics Symposium - IRPS, 14/04/2013, p.5C.5

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