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Browsing by Author "Park, Juhae"

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    Molecular modeling of EUV photoresist revealing the effect of chain conformation on line edge roughness formation

    Park, Juhae
    ;
    Lee, Sung-Gyu
    ;
    Vesters, Yannick
    ;
    Severi, Joren  
    ;
    Myungwoong, Kim
    ;
    De Simone, Danilo  
    Journal article
    2019, Polymers, (11) 12, p.1923

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