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Browsing by Author "Passefort, S."

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    In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition

    De Witte, Hilde
    ;
    Maes, Jan  
    ;
    Passefort, S.
    ;
    Besling, W.
    ;
    Eason, K.
    ;
    Young, E.
    ;
    Rittersma, Chris
    Journal article
    2002-09, Semiconductor Fabtech, 17, p.111-115

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