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In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition
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1986 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
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Metrics
Views
1986 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
Citations