Browsing by Author "Passefort, Sophie"
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Publication In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric films
Oral presentation2002, 5th Technical and Scientific Meeting of CREMSI: New Tools and Processes for Thin Active Layers in the Advanced FEOL TechniquesPublication In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
Meeting abstract2002, 201st Meeting of the Electrochemical Society. Rapid Thermal and Other Short Time Processing Technologies III, 12/05/2002, p.719Publication In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
Journal article2003, Journal of the Electrochemical Society, (150) 9, p.F169-F172Publication Scaling of high-k dielectrics towards sub-1nm EOT
Proceedings paper2003, IEEE International Symposium on VLSI Technology, Systems, and Applications, 23/04/2003, p.251-254