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Browsing by Author "Patil, Suraj"

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    Alternative materials for high numerical aperture extreme ultraviolet lithography mask stacks

    Wood, Obert
    ;
    Raghunathan, Sudhar
    ;
    Mangat, Pawitter
    ;
    Philipsen, Vicky  
    ;
    Luong, Vu  
    Proceedings paper
    2015, Extreme Ultraviolet (EUV) Lithography VI, 22/02/2015, p.94220I

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