Browsing by Author "Patsis, George"

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Room temperature analysis of Ge p+/n diodes reverse characteristics fabricated by platinum assisted dopant activation

Ioannou-Sougleridis, Vassilios
;
Poulakis, Nikolaos
;
Dimitrakis, Panagiotis
;
Normand, Pascal
Journal article
2013, Solid-State Electronics, 81, p.19-26
Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis

Constantoudis, Vassilis
;
Patsis, George
;
Leunissen, Peter
;
Gogolides, Evangelos
Proceedings paper
2004, Metrology, Inspection, and Process Control for Microlithography XVIII, 22/02/2004, p.967-977