Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Patsis, George P."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Determining the impact of statistical fluctuations on resist line edge roughness

    Leunissen, Peter
    ;
    Ercken, Monique  
    ;
    Patsis, George P.
    Oral presentation
    2004, International Conference Micro- and Nanoengineering

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings