Publication:

Determining the impact of statistical fluctuations on resist line edge roughness

Date

2004
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Author(s)

Leunissen, Peter
;
Ercken, Monique  
;
Patsis, George P.

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1856 since deposited on 2021-10-15
Acq. date: 2026-02-25

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1856 since deposited on 2021-10-15
Acq. date: 2026-02-25

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