Publication:
Determining the impact of statistical fluctuations on resist line edge roughness
Date
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.author | Ercken, Monique | |
| dc.contributor.author | Patsis, George P. | |
| dc.contributor.imecauthor | Ercken, Monique | |
| dc.date.accessioned | 2021-10-15T14:25:26Z | |
| dc.date.available | 2021-10-15T14:25:26Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9192 | |
| dc.source.conference | International Conference Micro- and Nanoengineering | |
| dc.source.conferencedate | 19/09/2004 | |
| dc.source.conferencelocation | Rotterdam The Netherlands | |
| dc.title | Determining the impact of statistical fluctuations on resist line edge roughness | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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