Browsing by Author "Patz, M."
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Publication Characterisation of JSR's spin-on hardmask FF-02
Journal article2003, Microelectronic Engineering, (70) 2_4, p.308-313Publication Interaction of a variety of ashing plasma with MSQ low-k dielectric
Meeting abstract2004, Extended Abstracts of the 205th Meeting of the Electrochemical Society, 9/05/2004, p.140