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Browsing by Author "Pavelka,"

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    Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge content

    Rosseel, Erik  
    ;
    Hikavyy, Andriy  
    ;
    Everaert, Jean-Luc
    ;
    Witters, Liesbeth  
    ;
    Mitard, Jerome  
    Proceedings paper
    2010-10, 18th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2010, p.62-65

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