Publication:
Impact of laser anneal thermal budget on the quality of thin SiGe channels with a high Ge content
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Acq. date: 2026-04-06
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Acq. date: 2026-04-06
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1 since deposited on 2021-10-18
Acq. date: 2026-04-06
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1783 since deposited on 2021-10-18
1last month
Acq. date: 2026-04-06
Citations